Trace moisture causes chip failure […]
Industry Pain Points
Trace moisture causes chip failure: Semiconductor manufacturing demands extremely low moisture content in compressed air; trace moisture can cause chip oxidation, short circuits, and significant yield reduction.
Oil mist contamination affects wafer quality: Oil mist in compressed air adheres to wafer surfaces, causing defects in lithography and etching processes, severely impacting product quality.
Particulates cause circuit short circuits: Micro-particles (≥0.1μm) can cause internal circuit short circuits or opens in chips, demanding extremely stringent cleanliness requirements.
24/7 continuous operation reliability*: Semiconductor fabs typically operate 24/7; equipment failure or air supply fluctuations can shut down entire production lines, resulting in enormous losses.
Solutions
Ultra-low dew point combined drying system: Use combined dryers to stably output -40℃ pressure dew point, meeting the stringent ultra-low moisture air requirements of semiconductor manufacturing.
Full stainless steel high-precision filtration system: Equip with stainless steel housing precision filters with filtration precision up to 0.01μm, ensuring oil-free, dust-free, microorganism-free pure air supply.
PLC intelligent control & remote monitoring: Equip with PLC control system supporting RS485 communication interface, enabling remote monitoring, fault self-diagnosis and alarm, supporting unattended operation.
Redundant design & uninterrupted air supply: Critical process links adopt N+1 or redundant configuration with seamless switchover, ensuring continuous production of semiconductor lines.
Recommended Products
Combined Air Dryer—DM110ZHMR
Micro-Heated Desiccant Air Dryer—DM15MR / DM40MR
Refrigerated Air Dryer—DM026APF / DM026GF
Stainless Steel Precision Filter
Optimized hardware for Electronics / Semiconductor applications.
Thank you for contacting us! Please share your air requirements (flow rate / pressure / dew point), and we'll match the best solution for you.